JPS6182130A - 表面弾性波圧力センサ - Google Patents

表面弾性波圧力センサ

Info

Publication number
JPS6182130A
JPS6182130A JP20508784A JP20508784A JPS6182130A JP S6182130 A JPS6182130 A JP S6182130A JP 20508784 A JP20508784 A JP 20508784A JP 20508784 A JP20508784 A JP 20508784A JP S6182130 A JPS6182130 A JP S6182130A
Authority
JP
Japan
Prior art keywords
surface acoustic
acoustic wave
frequency
oscillation
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20508784A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0582537B2 (en]
Inventor
Kenkichi Takadera
高寺　賢吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP20508784A priority Critical patent/JPS6182130A/ja
Publication of JPS6182130A publication Critical patent/JPS6182130A/ja
Publication of JPH0582537B2 publication Critical patent/JPH0582537B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP20508784A 1984-09-28 1984-09-28 表面弾性波圧力センサ Granted JPS6182130A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20508784A JPS6182130A (ja) 1984-09-28 1984-09-28 表面弾性波圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20508784A JPS6182130A (ja) 1984-09-28 1984-09-28 表面弾性波圧力センサ

Publications (2)

Publication Number Publication Date
JPS6182130A true JPS6182130A (ja) 1986-04-25
JPH0582537B2 JPH0582537B2 (en]) 1993-11-19

Family

ID=16501206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20508784A Granted JPS6182130A (ja) 1984-09-28 1984-09-28 表面弾性波圧力センサ

Country Status (1)

Country Link
JP (1) JPS6182130A (en])

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63164975A (ja) * 1986-12-27 1988-07-08 株式会社　エ−ス電研 ミニゴルフ場
JPS63164974A (ja) * 1986-12-27 1988-07-08 株式会社　エ−ス電研 ミニゴルフ場
JP2005214769A (ja) * 2004-01-29 2005-08-11 Kyocera Corp 圧力センサモジュール
JP2005214814A (ja) * 2004-01-29 2005-08-11 Kyocera Corp 圧力センサモジュール
JP2005241461A (ja) * 2004-02-26 2005-09-08 Kyocera Corp 圧力センサモジュール
US7353710B2 (en) 2003-11-27 2008-04-08 Kyocera Corporation Pressure sensor device with surface acoustic wave elements
US7387435B2 (en) * 1999-12-10 2008-06-17 Fujitsu Limited Temperature sensor
US7392706B2 (en) 2003-11-27 2008-07-01 Kyocera Corporation Pressure sensor device
WO2009087055A1 (de) 2008-01-09 2009-07-16 CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH Mikromechanischer drucksensor
JP2010160101A (ja) * 2009-01-09 2010-07-22 Denso Corp 弾性表面波センサおよび弾性表面波センサの圧力測定方法
DE102009031705A1 (de) 2009-07-04 2011-01-05 CiS Institut für Mikrosensorik GmbH Mikromechanischer Drucksensor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4867858B2 (ja) * 2007-08-29 2012-02-01 セイコーエプソン株式会社 Ｓａｗセンサ

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63164974A (ja) * 1986-12-27 1988-07-08 株式会社　エ−ス電研 ミニゴルフ場
JPS63164975A (ja) * 1986-12-27 1988-07-08 株式会社　エ−ス電研 ミニゴルフ場
US7387435B2 (en) * 1999-12-10 2008-06-17 Fujitsu Limited Temperature sensor
DE112004002281B4 (de) * 2003-11-27 2016-12-22 Kyocera Corp. Drucksensorvorrichtung
US7392706B2 (en) 2003-11-27 2008-07-01 Kyocera Corporation Pressure sensor device
US7353710B2 (en) 2003-11-27 2008-04-08 Kyocera Corporation Pressure sensor device with surface acoustic wave elements
JP2005214814A (ja) * 2004-01-29 2005-08-11 Kyocera Corp 圧力センサモジュール
JP2005214769A (ja) * 2004-01-29 2005-08-11 Kyocera Corp 圧力センサモジュール
JP2005241461A (ja) * 2004-02-26 2005-09-08 Kyocera Corp 圧力センサモジュール
WO2009087055A1 (de) 2008-01-09 2009-07-16 CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH Mikromechanischer drucksensor
DE102008003716A1 (de) 2008-01-09 2009-07-30 CiS Institut für Mikrosensorik GmbH Mikromechanischer Drucksensor
JP2010160101A (ja) * 2009-01-09 2010-07-22 Denso Corp 弾性表面波センサおよび弾性表面波センサの圧力測定方法
DE102009031705A1 (de) 2009-07-04 2011-01-05 CiS Institut für Mikrosensorik GmbH Mikromechanischer Drucksensor

Also Published As

Publication number Publication date
JPH0582537B2 (en]) 1993-11-19

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